First, the device uses the machine is suitable for sapphire, silicon, blue glass, GaAs chip and double-precision polishing other hard and brittle materials. Second, the main features of 1. This device is designed for high-precision physical and chemical polishing crystal materials developed footwall cooling system to meet regulatory polished operating temperature. 2. The use of three-motor synchronous drag down a tray utility motor, speed mechanical linkage fixed ratio; ring gear, the sun wheel independent motor drag, wider speed range, able to adapt to different requirements of the polishing process; the upper and lower polishing disc using helical gears, improves the smoothness of the operation. Using high-performance inverter is dragging, start, stop, no impact, speed and stability. 3. The sun gear and the ring gear synchronous uplift, to take place to meet the meshing position of the workpiece and adjust Cruises requirements. 4. Pressure using electrical proportional valve and closed-loop control weighing sensors, pressure level setting is more convenient and accurate, the operation is simple, reliable and stable. 5. Touch HMI native applications (PT) and PLC control, on the one hand to display operating parameters, on the other hand the process parameters set by its touch keys to adjust the main operation is completed by ordinary Jianniu; set by the user store multiple sets of different process parameters (pressure, time, speed) for the operator to call; control logic and interface can be configured to display the design according to customer demand. 6. The whole machine gantry structure, support stiffness; on the plate after rising to the highest position of insurance-linked automatic locking system on the disk, and provides a manual safety slings and security support to ensure the safe and reliable. 7. The machine is equipped with a centralized lubrication system, each movement of the machine can automatically lubricate parts; 8. shape and internal structure of the full consideration of the reliability, availability, interchangeability and ease of operation and maintenance. Third, the main technical parameters 1. grinding disc parameters: φ1149mm × φ343mm × 50mm 2. ring parameters: Z = 552 DP12 α = 20 ° 3. center wheel parameters: Z = 152 DP12 α = 20 ° 4. planetary gear parameters : Z = 200 DP12 α = 20 ° 5. ring lifting stroke: 30mm (motor lift mode) 6. Number of star wheel travel: 5 7. The main motor (driven footwall): 11kW 8. sun gear motor: 1.5kW 9. Gear wheel motor: 2.2kW 10. footwall speed: 0-50rpm 11. Solar speed: 0-20rpm 12. Gear speed: 0-20rpm 13. sand bucket capacity: about 30L 14. amended round: 4 / sleeve 15. Weight: about 5600kg 16. Equipment Dimensions :( L × W × H) 2200mm × 1600mm × 2700mm four requirements for equipment installation equipment should be installed flat on the ground, away from sources of vibration, dust, smog-free places . 1. Working temperature: 15 ℃ -25 ℃ 2. Air Source: 0.4-0.6MPa (dry and oil) 3. Relative humidity ≦ 80% 4. Power: AC380V, 50Hz (three-phase five-wire system) 5. Cooling water pressure: 2kgf / cm2 or less water: 30L / min Temperature: 7 ~ 12 ℃